I know that , but in my experement , to estimate inductor is not't hard , but Q is really difficult! Each tool will get different Q value and also different from our measurement data !cwcwecan said:First, You should have the process parameters
(e.g. Si:Er=11.9, Loss Tangent, and hight
Every Poly's , Loss Tangent, and hight
Every Metal's conductivity)
Then, Import the inductor's gds file to the EM simulator and Key in the process parameter above.
You can use @DS's momentum, Sonet, HFSS, Microwave Office, IE3D as your EM Simulator. According to my experiences, if the process parameters are right, you can get simulation results exactly.