rocking_vlsi
Member level 5

Hello
I am designing variable inductor in MEMS, by moving metal shield above the coil, the inductance is varied. The lumped model for that design is shown in fig.
My question is how to find the mutual inductance between coil and ground metal plate. As shown in lumped model, coupling co-efft is needed to model.
Is this mutual inductance is frequency dependent then how to find it.
I need geometry dependent analytical formula to find mutual inductance.
Thanks in advance...
I am designing variable inductor in MEMS, by moving metal shield above the coil, the inductance is varied. The lumped model for that design is shown in fig.


My question is how to find the mutual inductance between coil and ground metal plate. As shown in lumped model, coupling co-efft is needed to model.
Is this mutual inductance is frequency dependent then how to find it.
I need geometry dependent analytical formula to find mutual inductance.
Thanks in advance...