Help with capacitor Layout

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chravikumar

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Hello

Which layout is best for on wafer capacitance measurement? The idea is to measure the dielectric constant of a di-electric thin film on GaAs substrate.

Regards
RK
 

Cycle shape for varactor cap structure? It will have smaller sidewall capacitance.
 

now how would that layout be ..because, google search for a varicap layout did not give any useful results...
 

leo_o2 said:
Cycle shape
Click to expand...

I think Leo thought of circular shape: a circle maximizes the area/perimeter ratio, so you get least error from fringe effect.
 

Och come on... just use a rectangular structure with large area with respect to perimeter. That is what everybody does. Use a couple of different areas to eliminate the perimeter capacitance by extrapolation. Its not that difficult.
 

Yes. Sorry for typo.
erikl said:
I think Leo thought of circular shape: a circle maximizes the area/perimeter ratio, so you get least error from fringe effect.
Click to expand...
 

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