[SOLVED] Half dummy : use and advantages

[Rubinms88]

can anyone explain briefly about advantages of using half dummies in layout?
I think dummies are used to prevent over etching of poly..pls explain purpose of dummies..

 

[sulabh]

Here is a link you may find helpful,
**broken link removed**

 

[Rubinms88]

Here is a link you may find helpful,
**broken link removed**

Thank you for your reply but in that document there is no description about half dummies...

Can anyone explain about role of dummies in manufacturing process?

 

[leo_o2]

Yes. According to the book "Art of Layout", dummy poly is used to keep the same etching speed. the etching speed is related to poly space. If dummy poly is added, the poly space will be same, so delta W will be kept same for every segment.

 

[Rubinms88]

Thank you leo_o2..can you explain the advantages of using half dummies?

---------- Post added at 05:50 ---------- Previous post was at 04:58 ----------

Following link is explanation of sizing of dummy transistors
https://www.edaboard.com/threads/151876/....

 

[leo_o2]

Half dummy will have smaller die area comparing with full dummy.

 

[Rubinms88]

Thanks a lot leo_o2...

---------- Post added at 12:25 ---------- Previous post was at 11:46 ----------

can anyone post image of half dummy used in layout...

 

[leo_o2]

 

[Rubinms88]

This is what needed....thanks a lot leo