extracting parasitic capacitance in capacitive pressure sensor

[a ag]

Extracting parasitic capacitance of the capacitive pressure sensor how it is done. Electric model of how it is. Equations it is. Shaped sensor attached to the article is available.

 

[ahsan_i_h]

Hello a ag
Here is the electric model of a capacitive pressure sensor. The equation is similar to whitstone bridge equation with capacitor in each of the four arms. The parasitic capacitance are cancelled out because both sides of the moving diaphram have equal parasitic capacitance.