Good day guys...
Please help me with this...
I'm having a trouble regarding what type of crystal planes (100, 110, 111) is/are commonly used in silicon wafer fabrication..
And please add also a supporting reason why is it being chosen/preferred.
Re: crystal planes commonly used in silicon wafer fabricatio
allennlowaton said:
I'm having a trouble regarding what type of crystal planes (100, 110, 111) is/are commonly used in silicon wafer fabrication..
And please add also a supporting reason why is it being chosen/preferred.
Re: crystal planes commonly used in silicon wafer fabricatio
In addition to channeling and etching issues already mentioned
the 100 direction also provides the best interface conditions. If
I remember right that was the biggest problem during the
development of n-Fet devices. Having bad surface conditions
leads to a lot of 'opens' at the interface between substrate surface
and the gate -> loads of electrons get trapped -> high vt. Maybe this
is used nowadays for some special devices ...