To survive under this high 100MV stress,
the protection device (no matter diode/mosfet) must turn ON as mamy as possible during ESD stress. You probably need some triger ckt to help all protection device turn ON as fast & as mamy as possible. There are some ESD papers talking about this issue, you may find them on the forum.
Thanks for reply first.
Sorry for my title is not clear.
My question is frequency > 100MHz, may parasitic capacitors of ESD protection devices harmful?
The usual trick for dealing with a shunt capacitance is to adjust a series inductance so that a low pass filter is formed with flat response. This does not always work since the filter may cut off your signal.
1.IEEE Journal of Solid-State circuits June 2002 pp760
"A 0.8-dB NF ESD-Protected 9-mW CMOS LNA Operating at 1.23GHz"
2.IEEE Journal of Solid-State circuits Aug. 2000 pp1194
"ESD Protection Design on Analog Pin with very Low Input Capacitance for High-frequency or Current-Mode Application"
- This paper shows 1pF input capacitance which should be good enough for 100MHz operation.