hye, i'm doing a project about PIN Photodiode by using Athena. from the manual, it only show the process of silicon as the substrate. i'm using InP as the substrate

1) do i need to make an oxidation process on the InP substrate? because, if Silicon substrate, we need to oxide it by using SiO2

2) how to insert InGaAs (I+) by using athena in between InP(N+) and InP(P+)? as shown in figure below. thanks
Click image for larger version. 

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