What's happening during ion implantation in fabrication process?

[haswath]

hi ,
can anyone throw some light on where to get info for whats happening during ion implantation in fabrication process!
thanks

 

[brahma]

Re: ion implantation

Have a look at the vlsi technology by sze...its a good book...

 

[shaikhsarfraz]

Re: ion implantation

Hi,
Ion implantation is used to imlant impurity into intrinsic semiconductor.
That is you can say it is used for substrate and well formation.
Also it is prefrred over diffusion because of its accuracy.

For more details go through the book by Allen Hollberg

Thanks
Shaikh Sarfraz

 

[amit kumar]

ion implantation

Ion implantation is used to imlant impurity into intrinsic semiconductor.
in dis method intrinsic semiconductor is bombard wid ions of elements which are r to be used as dopent.

 

[deh_fuhrer]

Re: ion implantation

Here is the paragraph on ion implantation from 'Art of Analog Layout'.