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Re: What dose the "Slotted metal" mean in fabricat
in lots of super flat control process, there is very strict limitation for metal density (metal area vs total area), you can not use a very wide metal bus since it will exceed metal density locally, so that a methodology of dig holes on the big piece of metal is introduced, that is called slotting, and big metal bus with that kind of holes are called "slotted metal"
Re: What dose the "Slotted metal" mean in fabricat
Sorry mdcui,
there are two different issues:
1. Metal density should be controlled. That is because of dry etch and chemical polishing.
2. Slot rules in wide metal tracks. That is because to avoid delamination because of mechanical stress. This happens for temperature cycles and more on the supply rings.
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