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How to design CAD file for mask for optical lithography--CST MWS

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raihanreza

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hi Everyone
I have designed structure in CST MWS. Now i need to fabricate it by optical lithography. can anyone know how design the CAD file for MASK using CST_MWS. CST_MWS has the option to export 3D design files. another thing is my design is periodic along x and y. so i have designed only one unit cell but my mask should contain atleast a 50x50 array.
 

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