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Help!!! How to get very low Vt NMOS C-V curve

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Monky

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heavy doped NMOS, TOX=80A, Arsenic 1.0E15 atom/cm², sweep Vg=-3~3V, VS=VD=VB=0.
Now no right curve got, even part of curve.

Another, Can use Agilent-4284 test LF C-V? Any special setting?

thanks

---------- Post added at 11:11 ---------- Previous post was at 11:05 ----------

Arsenic 1.0E15 atom/cm² doped in channel, so Vt<-8V, if force voltage +/-10V, GOX beakdown.
Any experts can answer my question?
 

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