Die micrograph - Dummy metal fills obstructing the view

[dinos7]

Hi,
I needed to micrograph my die and tried with Keyence microscope but it couldn't see the layout past dummy metal fills on top five layers. I have seen people showing micrograph of entire die. how do they manage to do that?
Thanks!

 

[dick_freebird]

Older technologies may have had no fills.

You could deprocess upper layers to remove fills but this
also removes explicit circuit structure.

Die photos that encompass the whole die may see the fills
indistinguishable from design detail. Depth of field may work
against you at high mag, close in (like microscope) and
might work better with a camera and zoom / macro optics.