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why does 6mbp15rh06 IPM burn?

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we use 6MBP15RH060 and 6MBP20RH060 at servo drive system . but in some servo drives, some of these IGBT were damaged. in these IGBTs terminal U or V or W shorted to P or N or both of them . how do we can protect IGBT from damaging.
question: is there any short circuit protection in these version of IGBT :6MBP15RH060 and 6MBP20RH060?
if not , what can we do?
we have dead time in pwm to avoid short circuit but this fault occurred.
is there any replacement product for 6MBP15RH060 and 6MBP20RH060 with short circuit protection and similar pin-out ?
 

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