Aluminum was used but it tends to oxidize...so polysilicon was used but it has very high resistivity...
Tungsten contacts are less susceptible to oxidation than Al, and they also have higher annealing and melting temperatures...lower resistance than polysilicon....they have greater contact lifetime...
it also depends on the type of designs you have and the process you're using
Aluminum was used but it tends to oxidize...so polysilicon was used but it has very high resistivity...
Tungsten contacts are less susceptible to oxidation than Al, and they also have higher annealing and melting temperatures...lower resistance than polysilicon....they have greater contact lifetime...
it also depends on the type of designs you have and the process you're using