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which is the stable resistor in tsmc90nm technology

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diaz080

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i was designing a relaxation oscillator in tsmc 90nm technology..designed for 33khz.rpodw_m model resistor was used along with crtmom cap...i need 1Meg resistor value along with 13pF cap so as to design for 33khz operation. when i run the corner simulation ,huge variation of frequency of operation was found in fast & slow corners..why is it so ? do anybody know the temperature coefficient value of rpodw_m resistor model ? help please :?:
 

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