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The dspic series from microchip have sampling rates as fast as 1.1MSPS (mega samples per second) means that they have conversion times less than 1usec.
Take a look at the ADuC7020 (and such) from Analog Devices - a smallish, relatively cheap ARM, integrated bootloader. It has a 12bit ADC with almost 1MSps and a fair amount of other stuff.
Hi,
Since you use ATMEGA, look at ATxMEGA which has 12-bit 2Msps ADC. You can sample 4 inputs in 1.5us (check the datasheet for this, I don't use this) with 1x to 64x software selectable gain and internal 1.00V reference.
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