what is the use of M0,M0_OD1,M0_OD2 layer in 20/16nm FINFET process?

[ms_90]

while reading some finfet docs, i found that M0,M0_OD1,M0_OD2 layers in 20/16nm FINFET process..can someone please explain the use of those layers?

 

[saurabhr8here]

The information you're sharing is foundry-specific data most probably covered under NDA. It'd be advisable to seek this information from the foundry and not post questions/information in a public forum.

 

[ms_90]

sorry i didnt know these things....i will not share such info again...

 

[Prashanthanilm]

Yes. NDA Restricted Info.

To Clarify your query, those are intermediate Contact rules from Poly or Active to Metal.

Due to shrink we are not able to place the contact in active as in case of Planar Transistor. Hence in FinFet you have intermediate layer to connect PO/Active to Metal.