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What exactly are measured and fitted R, L and C values and how to extract from HFSS?

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binnx1

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Hi,

I have read in most of the RF MEMS papers that measured and fitted R, L and C values. What exactly are they and how to compute?
I simulated the designs in HFSS. By default I have option to plot S parameters. But how to check R, L, C and Q-factor from same software?
 

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