Typical VLCI interconnect resistance range

[carbon9]

Hi all,

What is the interconnect's parasitic resistance and capacitance range (min. and max. values) for a typical VLSI process (or for a spesific process) ? Could anyone give some info or recommend a source that I can find info on this question?

With regards,

 

[ksooryakrishna1]

It is dependent on technology node. For typical 180nm technology node, resistance is of the order of 60 ohms, ground and coupling capacitance of 200fF and inductance of 4nH for a typical interconnect length of 2.5mm. These data's are not direct from foundry. Using predictive models, we can found the parasitic values.