TSMC 65nm Inductor Finder Parameters

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mahir

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Hi, I am newbee at RFIC. I try to make cross-coupled VCO. I want to ask about inductor at 65nm TSMC library paramters. Could you explain the parameters which are Q, F(Qmax), Freg etc.
 

Q: Quality Factor of the Inductor
F(Qmax) : The Frequency where the Q Factor becomes maximum
Freg : ?? I don't know..
 

There is also working frequency what is the meaning of this. Is it represent maximum frequency which inductor can work or something else. Is Qualiity factor parameter represent the max Q value?
 

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