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"Triangle is flat" error in Sentaurus Process

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fujimuji

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Hopefully someone can help solve the following. I am trying to run a sentaurus process simulation and keep getting the error below; after field oxidation growth then nitride and pad oxide removal.

** Error **
triangle 122912 is flat
!

... aborting

** Error **
Internal error !
Click to expand...


I have tried remeshing by using 'grid remesh' but that didn't make a difference. Also 'grid refine.check' reports everything is fine.

Thanks.
 

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