Even if somebody had this information directly, they wouldn't be able to tell you because of non-disclosure agreements. Are you working through MOSIS? They might have spice models or better documentation available from which you could estimate the inter-metal thicknesses.
Right! With values from the last extracted c5 run - and the specific resistivity of Al ρAl = 0.0282 Ω*µm you can estimate a thickness of 0.31µm for M1 & M2, and 0.56µm for M3.
thank you for your response. Can you tell me what values from the last extracted C5 run should I take, for the calculation of the thickness of M1, M2 and M3 ?
I don´t know why you use the value 0.0282. in the file you gave me, each metal has it´s own resistivity.
I believe Erikl was looking at the Sheet Resistance. https://en.wikipedia.org/wiki/Sheet_resistance is a good reference here. This is a measure of the resistance of the metal, given a certain thickness. The parameter he gave was the resistivity of the metal layer independent of geometry.
The equation of resistance given in the wiki article was R = q * L/A. Note that the area is A = H*W. So, the full equation is R = q * L/ (H*W). I believe the parameter you want is H, the height of metal layer.
The sheet resistance in the file is measured in ohms/square. This corresponds to the assumption that the length L and with W are equal. So, making the assumption that L=W and putting that into the resistance equation, we get Rsq = q / H. So, rearrange the equation and we get that H = q / Rsq. In words, the metal height is equal to the metal resistivity divided by the resistance per square.
So, for layer M3, the highest metal layer, we have q = 0.0282 ohm/sq and Rsq = 0.05 ohm/um^2. With the equation we get H = 0.56um.
THank you ! One more question. Do you know where can I find the value of the thickness of the oxide layer (SiO2) in the technology AMI 0.5 um with a lambda of 0.3 um ?