cherishlzd
Junior Member level 2
Hello everyone,
I used the silvaco TCAD to extract capacitance of the PN junction. first, using the 2D structure, the extracted capacitance with unit F/μm. then, I change to 3D structure, but the result also shows that the unit of capacitance with F/μm. I want to know why there is no difference in unit of capacitance between 2D and 3D simulation. thanks!:smile:
I used the silvaco TCAD to extract capacitance of the PN junction. first, using the 2D structure, the extracted capacitance with unit F/μm. then, I change to 3D structure, but the result also shows that the unit of capacitance with F/μm. I want to know why there is no difference in unit of capacitance between 2D and 3D simulation. thanks!:smile: