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the unit of capacitance in SILVACO TCAD ?

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cherishlzd

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Hello everyone,

I used the silvaco TCAD to extract capacitance of the PN junction. first, using the 2D structure, the extracted capacitance with unit F/μm. then, I change to 3D structure, but the result also shows that the unit of capacitance with F/μm. I want to know why there is no difference in unit of capacitance between 2D and 3D simulation. thanks!:smile:
 

kannadassan

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I hope the unit cell capacitance (1um side) is calculated by silvaco, therefore - there is no difference between 2D or 3D. So you can calculate the real capacitance by multiplying the total units per electrode area. Capacitance of PN junction is a nice concept to start with, enjoy....
 

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