Jan 19, 2022 #1 K KingDarius6288 Junior Member level 2 Joined May 10, 2019 Messages 24 Helped 0 Reputation 0 Reaction score 0 Trophy points 1 Activity points 210 Hello everyone, I was wondering what is the type of material and its dielectric constant that fills the gaps around the metal 6 layer in CMOS180nm TSMC. Thanks
Hello everyone, I was wondering what is the type of material and its dielectric constant that fills the gaps around the metal 6 layer in CMOS180nm TSMC. Thanks
Jan 25, 2022 #2 T ThisIsNotSam Advanced Member level 5 Joined Apr 6, 2016 Messages 2,548 Helped 397 Reputation 794 Reaction score 463 Trophy points 1,363 Activity points 14,760 this is not public information, it cannot be shared in a forum. Upvote 0 Downvote
Jan 25, 2022 #3 D dick_freebird Advanced Member level 7 Joined Mar 4, 2008 Messages 8,957 Helped 2,333 Reputation 4,683 Reaction score 2,512 Trophy points 1,393 Location USA Activity points 71,383 Perhaps some information in this thesis (I have not waded through it, but search terms seem valid - at least, if your particular 180nm flow uses copper backend): tsmc 180nm interlevel dielectric https://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=&ved=2ahUKEwjN6f3Zwc31AhUhTDABHfZVAYcQFnoECCsQAQ&url=http%3A%2F%2Fewh.ieee.org%2Fr5%2Fdenver%2Fsscs%2FReferences%2F1999_03_Loke_PhDThesis.pdf&usg=AOvVaw1bRUNTTN_U2pRdH3v98Cm_ Upvote 0 Downvote
Perhaps some information in this thesis (I have not waded through it, but search terms seem valid - at least, if your particular 180nm flow uses copper backend): tsmc 180nm interlevel dielectric https://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=&ved=2ahUKEwjN6f3Zwc31AhUhTDABHfZVAYcQFnoECCsQAQ&url=http%3A%2F%2Fewh.ieee.org%2Fr5%2Fdenver%2Fsscs%2FReferences%2F1999_03_Loke_PhDThesis.pdf&usg=AOvVaw1bRUNTTN_U2pRdH3v98Cm_