Hello all,
I am trying to simulate MEMS varactors (like PARALLEL PLATE) in HFSS. I could not understand port definitions(like whether to use waveport or lumped port etc) and excitations very well. CAn anyone who has done simulation of mems structures help?
thanx
Hello,
for simulation of your mems structure you can use ANSYS (for simulation of mechanical parameters of your varactor and also low frequency properties of your structure) and HFSS (for high fr. response of varctor).
hi mems,
I am using Coventor for mech and coupled electro-mech simulations. Coventor is very easy(costly though) when compared to HFSS.
thanx for your reply
cv