guoluren
Newbie level 5
Hi, I am designing a multilayer interdigitated capacitor in a BiCMOS process with 6 metal layers. This capacitor is mainly for decoupling purpose, but some variants are also used for RF purpose in millimeter-wave range. Targeting capacitance falls in the range of 50fF to 300fF roughly.
I have made layout with cadence and extract it with Calibre RC. I have made em simulations with ADS Momentum and Sonnet EM. The resulting capacitor between the two electrodes is very similar with Calibre and Momentum. But the result from Sonnet is about 20% lower. I think I have taken care of deembedding as well as subdividing thick metal enough in Sonnet. But the result remains. Could anybody give me some suggestions about this? Thank you!
I have made layout with cadence and extract it with Calibre RC. I have made em simulations with ADS Momentum and Sonnet EM. The resulting capacitor between the two electrodes is very similar with Calibre and Momentum. But the result from Sonnet is about 20% lower. I think I have taken care of deembedding as well as subdividing thick metal enough in Sonnet. But the result remains. Could anybody give me some suggestions about this? Thank you!