silvaco tcad software problem

[Rajnarayan Tripathy]

can anyone help me how to design a 65nm nchannel mosfet using silvaco tcad ??? i dont any method trying a lot but didnot get...

 

[bhatavi24]

Hi Rajnarayan
In Silvaco 2D the Default width is 1um, only the Length and the depth factor of the Device Can be varied.

For example if you want to simulate the MOSFET of 65nm.
You can using the following Deck

X.mesh loc=0 spac=0.05
x.mesh loc=0.01 spac=0.05
x.mesh loc=0.06 spac=0.01
x.mesh loc=0.065 spac=0.05

The X.mesh defines the Length aspect of MOSFET, similiarly you need to define the Depth aspect y axis.

Next define the region, Electrode and doping

 

[Rajnarayan Tripathy]

thank you