These are articles written by Aplac developers on MEMS...and not RF MEMS books...
These are the goodbooks for RF MEMS
Gabriel M. Rebeiz, "RF MEMS, Theory, Design, and Technology". John Wiley, 2003. ISBN 0-471-20169-3
Reinhold Ludwig and Pavel Bretchko, " RF Circuit Design, Theory and Applications". Prentice Hall, 2000. ISBN 0-13-122475-1
and
Vijay K. Varadan, K.J. Vinoy, K.A. Jose , "RF MEMS and their applications". John Wiley, 2003. ISBN 0-470-84308-X
---manju---