RESISTIVITY orders of layers

[Yathin P U]

Hi all,

i know that the resistivity orders of layers are as follows:

N well(highest) -> diffusion -> poly -> M1 -> M2 -> M3 .......

but i want to know where does "gate oxide" and "substrate" fits in list.

thanks in advance.

 

[erikl]

Substrate resistivity is higher than N-well's, hence left of N-well.
Gate oxide is an isolator (and so would lie far far left of substrate), but can't be used as a resistor, anyway.

 

[Dominik Przyborowski]

In fact it depends to specific technology.
The high resistivity polysilicon could have higher resistivity than n/p-well, also some higher metal layers (mostly used for MIMCAPs) has higher resistivity than routing metal layers. Also diffusion used for resistors could have higher resistivity than gate polysilicon. Everything depends to technology