Resistance of Parallel Plate Capacitance when Plates are "Touching"

[SeriousTyro]

Hi gents,

When conductive metal layers are connected, the overall resitivity of the metals is small. Though during this process, an oxide will form between these layers.
A parasitic capacitance can be calculated by using the simple parallel plate model.

However I am having trouble determining the overall resistance of this setup.

Below is what I have done, any suggestions would be highly appreciated.

 

[chuckey]

It all depends on the reactance of the capacitor and the value of Rp. If the values are say, 100Pf and 1K. At 50 Hz its a resistor with a very small capacitor across it. At 1GHZ it is a low impedance capacitor with high DC leakage, but is suitable for Vcc decoupling.
Frank