Relation between sensitivity and thickness of NEMS/MEMS

[rahul.6sept]

Dear all,

kindly let me know the mathematical relation that specifies the relation between film thickness and sensitivity of nems/mems. I guess sensitivity should increase with reduction of thickness.


Sincerely,

rahul

 

[FvM]

Obviously the answer depends on the meachanical function implemented in the system. If you are referring to MEMS springs or elastic membranes, you can refer to the elementary relations in mechanical engineering, e.g. for the stiffness of a bar or a plate.

Presumed you are involved in engineering education somehow, review your mechanics text book.