Oct 9, 2018 #1 K kumarans Member level 2 Joined Aug 4, 2007 Messages 46 Helped 1 Reputation 2 Reaction score 1 Trophy points 1,288 Activity points 1,502 Dear All, May I know the reason why we are not using the 45 degree metal routing in 14nm and below tech nodes. Kindly clarify. Rgds KumaranS
Dear All, May I know the reason why we are not using the 45 degree metal routing in 14nm and below tech nodes. Kindly clarify. Rgds KumaranS
Oct 9, 2018 #2 Dominik Przyborowski Advanced Member level 4 Joined Jun 6, 2013 Messages 1,210 Helped 505 Reputation 1,015 Reaction score 506 Trophy points 1,393 Location Norway Activity points 9,311 Usually the answer is in the physics of the photo lithography process. Omitting rules forced by finfets, there are a rules resulted from Multiple Patterning
Usually the answer is in the physics of the photo lithography process. Omitting rules forced by finfets, there are a rules resulted from Multiple Patterning