There are tons of data on MIM capacitors in the literature - check this paper, as an example, and its citations:
J. A. Babcock et al., "Analog characteristics of metal-insulator-metal capacitors using PECVD nitride dielectrics," in IEEE Electron Device Letters, vol. 22, no. 5, pp. 230-232, May 2001.
https://ieeexplore.ieee.org/abstract/document/919238/citations?tabFilter=papers#citations
Voltage dependence, frequency dependence, temperture dependence - are all important for precision analog applications.
Of course, linearity is much better for MIM structures, than for semiconductor devices.
But, there is a great variety of materials, structures, etc. used for MIM capacitors.
Different foundries offer different options.
For a specific foundry, you should look at the electrical design rule manual.
For general properties, and for general information - look at the literature (e.g., at IEEEXplore).