i use a standard network analyzer set up in time domain mode with a step function.
if the reflected signal is a straight line, you have a good 50 ohm match with not short or open circuits, and little inductive or capacitive parasitics shown. it will work well easily up to 30 GHz
If there is an open circuit (like from a sliding contact), or a short circuit (some conductive epoxy, or some conductive debris) it is OBVIOUS in the time domain response. You can even test an empty housing that has had hermetic 50 ohm connector beads welded into it, before installing all the substrates components--just slip on the field replaceable coax connectors, and hold down a tiny 50 ohm chip resistor on the inside microstrip coplanar launch with a wooden Q-tip. it can save you the cost of installing all the internal parts and THEN figuring out there is something wrong with the basic housing
i suppose you could current limit your ohmmeter test with say a 10K resistor, so if you do inadvertently forward bias a semiconductor junction, there will not be enough current to damage anything? A 10K reading would mean a short circuit.