Number of dopant atoms in different technology nodes

Negneg · Apr 22, 2015

Hi,

Does anyone have a link to a reference about the number of atoms in a transistor for different technology nodes (32nm, 22nm, ...)? Or if there is any calculation method? Even something like a graph showing the decreasing trend in the number of atoms with the Moor’s law!

Thanks,
Negar

erikl · Apr 22, 2015

Search G00GLE. Here are some examples from scientific publications:

From Atom devices based on single dopants in silicon nanostructures:

For that purpose, we investigated devices having a structure as shown in Figure 2a: SOI-FETs with the channel pat- terned by an electron beam lithography technique to have a width of about 50 nm and a length between 20 and 150 nm [see Figure 2b]. Top Si layer has a final thickness of only 10 nm and is doped uniformly with phosphorus to a concentration ND ≅ 1 × 10¹⁸ cm-3 (as estimated from secondary ion mass spectrometry of reference samples). A simple estimation would give a number of 10 to approximately 75 dopant atoms in the device channel, depending on the channel dimensions.

From book Nano-Electronic Devices: Semiclassical and Quantum Transport Modeling:

Number of dopant atoms in different technology nodes

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