Apr 11, 2006 #1 D Dido_Huang Newbie level 1 Joined Apr 11, 2006 Messages 1 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,285 h2 alloy In 0.18LG process, H2 alloy post metal etch will bring metal voids issue. Why?The temperature or the H2 cause it? Pls give me your comments,TKS.
h2 alloy In 0.18LG process, H2 alloy post metal etch will bring metal voids issue. Why?The temperature or the H2 cause it? Pls give me your comments,TKS.