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Need help on SOI as substrate Sentaurus Ligament Flow Editor

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Kong Kok Hong

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Hi, I am currently doing the Sentaurus simulation of nanowire transistor for my undergrad fyp, I was asked to use the ligament flow editor to fabricate the device.

Is there a way to select silicon on insulator (SOI) as the substrate in ligament flow editor?

Any help would be appreciated,thanks!
 

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