Aug 11, 2016 #1 B biju4u90 Full Member level 3 Joined Dec 10, 2014 Messages 172 Helped 3 Reputation 6 Reaction score 3 Trophy points 18 Activity points 1,437 Why do we have a maximum width rule for metal layers? Or why do we use metal slotting instead of using a wide metal layer??
Why do we have a maximum width rule for metal layers? Or why do we use metal slotting instead of using a wide metal layer??
Aug 11, 2016 #2 T ThisIsNotSam Advanced Member level 5 Joined Apr 6, 2016 Messages 2,562 Helped 397 Reputation 794 Reaction score 466 Trophy points 1,363 Activity points 14,844 It is because of density and how CMP affects metals differently based on their width. The foundry needs to cap what metal widths you can have so they can guarantee CMP will work within their constraints.
It is because of density and how CMP affects metals differently based on their width. The foundry needs to cap what metal widths you can have so they can guarantee CMP will work within their constraints.