laying out N+ poly resistor and other unsilicided and silicided poly resistors

[analogdesigncdac]

laying out N+ poly resistor and unsilicided N+ poly resistors

Hai

I am using ST 65nm process. Its having the following poly resistors with different flavours

N+, P+ poly resistor; unsilicided & silicided N and P ploy resistors.

difference in laying out simple N+ poly and unsilicided N+ poly resistors

with regards
satya

 

[dick_freebird]

Look for a silicide blocking layer in the PCells and layertable?
Your layout groundrules package ought to be pretty explicit,
have you read it?

 

[analogdesigncdac]

Hai,

Thanks for your reply. I just want to make myself clear regarding the problem. Between unsilicided poly and silicided poly resistors we know the difference. But between simple N+ poly and unsilicided N+ poly what is the general difference.

thanks
satya

 

[dick_freebird]

The difference is the silicide, which is blocked to make a
high (N+ doping defined) resistance. Unblocked, the
global silicide will overstrap the poly with the WSi, TiSi,
whatever - a parallel resistor in effect.