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Issue of design-process interactions at the sub-nano technology nodes

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ameed

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hi all,


At the sub-nano technology nodes, the impact design-process interactions have on yield is

becoming a huge factor and is very design-dependent. Expecting a designer to understand the

nuances of the sub-nano process issues, and the process engineer to understand the design

issues is very optimistic, but not realistic. Making sure that a design is less sensitive to litho and

other layout-related yield loss issues is critical.
can anyone suggest:?:
 

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