How to construct higher resistance 4 resistor in TSMC0.35um

[acey80]

Currently we are working on a big project. The highest resistor value is 80kohm. If we are only using poly2 (which has the highest sheet resistance in TSMC 0.35um), the resistor size is going to be very very big. The resistor type is double poly, and so the resistor is constructed with poly2 & p2hiR, metal 1, contacts and n-well layers.
I'm wondering if we can change the body material to another layer (pdiffres) to increase the resistance value. I'm referring to the book IC LAYOUT BASICS by Christopher Saint (page 169).
He said that:
"One way to make region of higher resistance is to implant extra stuff (higher sheet resistance material) in the poly, discouraging the easy flow of electrons.........it's simply altering the material in the center."
When I tried the method, the resistance of the same size resistor is increased by about 56%.
Is this proven? I mean, is it fabricated in the real world?

Next, if this is proven, can we apply this method in the serpentine type of resistor?

Please advise.

Thanks in advance.
Regards...

 

[renwl]

Re: How to construct higher resistance 4 resistor in TSMC0.3

you can contact TSMC for high resistance resistor model and layer.