How to calculate/find tox/Cox

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pekachoo007

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how to calculate or find Cox and tox for Dongbu 0.11/0.13um
 

Process control info (which ought to be a piece of design
kit collateral) should include an electrical and probably
optical Tox. Cox would follow eSi*e0*tox, bearing in mind
that electrical tends to be thicker than optical due to
poly depletion, etc. (the reason for an electrical Tox
measurement, is largely to ensure control of such second
order issues).
 

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