Hi, dragonwell.
You will make a sample wafer to measure the parameters. In the sample wafer, you will include one or more patterns for each parameter. During preparing each pattern, you will fully understand the effects of the pattern, which means the isolation of each pattern is established in that the other parameters are not to be affected by the pattern.
After the sample wafer come out, you will measure the electrical values for each pattern. Then, according to the parameter definition, you will determine each parameter.
Have a good luck!
Bye~~