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The substrate resistive component creates intrinsic noise due to thermal noise at the background of the spurious signals. The strength of intrinsic noise is relatively low compared to that of switching noise. Thus it is often ignored in most substrate noise analysis.
Resistivity of the n-well under OD /under STI is around 500/900 ohms/sq for a modern process that i have access to.
I am sure you can find a similar parameter in your own process files.
Similarly other resitivities can also be found.
Due to the distributed nature of the substrate, it is very difficult to caculate the real resistance since there are too many reference points. Cadence right now offer a tool called "VCA" can do the substate resistance extection.
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