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High speed electron trajectories in Si

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Aircraft Maniac

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Hi every one...

Does any one have an idea of which software to use to simulate the trajectories of high speed electrons when they hit a silicon substrate...as in the case of electron beam lithography??

Aircraft Maniac
 

You can simulate all mathematic or physics graphs or trajectories in standard WINAMP (AVS) - advanced visual studio. There I draw Lissajous figures (in 3D TOO) .
 

I think maybe there is no ready program until now. Please try to find a simulator for ion-implantation. Modify it!
 

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