High performance MIM capacitor for RF BiCMOS/CMOS LSIs

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engrvip

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1. High performance MIM capacitor for RF BiCMOS/CMOS LSIs
Yoshitomi, T.; Ebuchi, Y.; Kimijama, H.; Ohguro, T.; Morifuji, E.; Momose, H.S.; Kasai, K.; Ishimaru, K.; Matsuoka, F.; Katsumata, Y.; Kinugawa, M.; Iwai, H.;
Bipolar/BiCMOS Circuits and Technology Meeting, 1999. Proceedings of the 1999
26-28 Sept. 1999 Page(s):133 - 136
 

Re: MIM capacitor

mim cap paper
 

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