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HFSS Surface Recovery Failure error

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kritia

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Hi,

I have an array of nanowires which are basically cuboid. They have length=1um, width=1um and height=1um covering an area of 36x36um located 10nm apart.

They are on a substrate of height 10um and area 48x48um.

When I change the height of the nanowire from 1um to 4um I see the error: Surface Recovery failure Possible reasons : (1) . model has multiple objects with thin layers (2) complex model with object overlapping (3)" True surfaces are skewed.

With 1um height the simulation works without any errors.

Please help.
 

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