Help!! why my HFSS results is unreal !

[hsc_17]

Now I am using HFSS to simulate a on-chip spiral inductor in a 130nm CMOS technology.

I am a newer in HFSS and have been confused by it for two weeks.

I simulation a spiral inductor having exactly the same dimension with the inductor mentioned in the technology manuals. but the HFSS simulation results is totally different with the measurement results in the manual.

the following is the comparison between the HFSS results and the measurements:
Freq range(GHz) Q-peak inductance (nH)
Measurement 10~30 22 at 18GHz 0.4~0.3(decrease with freq)

HFSS results 10~30 4 at 10GHz(decrease with freq) 0.4(increase with freq)

I add my HFSS files here. Could someone help me to find where is the mistake?

I really appreciate your help!

 

[hsc_17]

come up guys!

I dont believe you have no ideas.

 

[tyassin]

Hi

Can you post this "manual"? or something so we can compare the results and structure with your HFSS file.

Thanks

 

[hsc_17]

The following is the inductor measurement results from the manual.

cause the manual is from the foundary, so i cant show here totally, it's illegal.

I just show the performance of the inductor i simulated. Sorry for that.


the inductor i simulated is the one with '' w=10um, s=1um, n=1, x=200um'', here s is not correct, cause there is only one turn.

thanks in advance!

 

[hsc_17]

i am waiting till....

 

[hsc_17]

There isn't anyone can help me?

I really need help...

 

[tyassin]

Hi

Can you give the details for the substrate?

 

[hsc_17]

substrate:

hight: 250um
Relative Permittivity: 11.9
Bulk conductivity: 2siemens/m
Loss Tangent: 2

Thanks in advance!